Fabrication and Characterization of Polycarbonate Substrates for High Yield Assembly of Multicomponent Biohybrid Microrobots

This paper presents polycarbonate negative topographies used as substrates for the templated selfassembly of microsphere-based microrobots. This approach protects primary structures from damage during molding and de-molding, providing high fidelity negatives of arrays for assembly via templated assembly by selective removal (TASR). We show that reducing the surface energy mismatch between the microspheres and substrate results in yield increases up to 790%. This work addresses yield-related challenges of multicomponent microsystem assembly with existing PDMS-based templated assembly methods. The application of this technology in DNA microswimmer fabrication is demonstrated.