Mems-Based Ultra-High Frequency Wireless 10x10 Qcm Biosensor Array Chip

The quartz crystal microbalance (QCM) biosensor is one of the devices that enables label-free evaluation of biomolecular reactions. Commercial QCM biosensors have less than 10 channels for detection and are not suitable for the screening. The sensitivity of the QCM biosensor increases as the quartz thickness becomes thinner; however, the limit of thinning is 60-330 μm. In this study, applying micromachining technology, a biosensor array chip of 15 mm square that had 100 ultra-thin quartz resonators (2.5 μm) that were operated wirelessly was developed. And we succeeded in detecting the resonance spectrum through the device evaluation.