Tension-Induced MOEMS Graphene Resonant Pressure Sensor

Graphene micro-resonators could be utilized for high-sensitivity pressure sensing. In this paper, a tension-induced micro-opto-electro-mechanical systems (MOEMS) graphene resonant pressure sensor was first reported to our knowledge. The fabrication process involved the use of anodic bonding and fiber optic sensing technology to construct a hermetically sealed vacuum cavity, which allowed the graphene resonant sensor to operate at pressures exceeding one atmosphere with full-scale stably high quality factors. Pressure test in the range of 0-100 kPa revealed a pressure sensitivity of 2 Hz/Pa, as well as a minimal temperature drift of only 0.014%/℃ in the range of 0-50 ć , which is merely 0.45% of the electrical counterpart. This novel structural design offers a promising avenue for developing pressure sensors using two-dimensional (2D) material resonators.