NEMS Pressure Gauge based on 2D Ti3C2Tx Resonators

In this work, we report NEMS pressure gauge based on two-dimensional (2D) Ti
3
C
2
T
x
nanoelectromechanical system (NEMS) resonators vibrating in the high frequency (HF) band. We demonstrate that these devices exhibit robust mechanical vibration response using optical detection combined with different excitation schemes, and can be used as pressure sensor with high responsivity and good sensitivity.