A Three-Axis Co-Oscillating Vector Hydrophone Based on MEMS Electrochemistry

This paper reports a triaxial co-oscillating vector hydrophone based on MEMS electrochemistry. The hydrophone consists of a triaxial electrochemical vibration sensor and a synchronous vibration shell. Sensitive chips in the sensor are manufactured using MEMS technology. The hydrophone has higher sensitivity (-179 dB@ (0.8~100 Hz)) during a lower measurement frequency band than hydrophones of other principles. The coupling between the hydrophone axes is weak, and the pit depth is about -40 dB. The noise of the hydrophone is close to the zero sea state. The above characteristics show that the hydrophone has the potential to be used in practical applications.