MEMS Scanning Grating Based Compact Diffuse Reflectance Spectroscopic Module for Skin Analysis

Diffuse reflectance spectroscopy (DRS) allows non-invasive and rapid skin analysis. Here we report a compact DRS module using MEMS (Micro-Electro-Mechanical Systems) scanning grating for on-demand skin analysis. The module comprises LEDs (Light Emitting Diode) and microspectrometer with scanning grating. The DRS module detects the diffused light from LEDs with a photodiode by scanning the diffraction grating. The DRS module is fully packaged by mounting LED sources besides the entrance slit of the microspectrometer and has a spectral response range of 400 nm to 1,000 nm with a spectral resolution of 5.4 nm. This compact module can facilitate on-demand skin analysis.