A High-throughput Uniform-Sized Droplet Generator with a Triangular Cross-Section Channel Fabricated by Simple Mems Process and Self-Alignment

In this study, a step emulsification (SE) device with an inverted triangular cross-section channel was developed for high-throughput monodisperse droplet generation. The SE device consisting of two different height channels (step ratio of sample solution and carrier oil channel heights = 1 : 4) was fabricated by simple, low-cost MEMS processes (e.g., anisotropic wet etching), and the triangular channel design for the sample solution was easily formed through a self-alignment process based on geometric similarity. The developed SE device successfully created the same size of droplets over a wide range of flow rate variations. The stable and robust droplet generation capability of the developed device allowed for massive production.