Fabrication Method of Versatile Micro/Nano Hierarchical Structure and Its Usage as Superhydrophobic Flexible Film

In this research, we propose the fabrication method of versatile micro/nano hierarchical structures; Microstructuring was done by micro-molding of the polyimide (PI) varnish, and the nano-structuring was done by additional nano-transferring of the nickel (Ni) nanodot onto the PI microstructure and sequential reactive ion etching (RIE). Through the proposed method, we successfully fabricate the flexible film with a micro-pillar/nano-thumbtack hierarchical structure that shows the superhydrophobicity (water contact angle (WCA) of 171.26°).