Parametric Impedance Modulation in Depletion Layer Transduced Micromechanical Resonator

This paper demonstrates a scheme to modulate the impedance in a depletion layer transduced resonator using parametric effect. The measured results show that the impedance of the device reduces from 334.2 kΩ with no pump to 45.9 kΩ with 300 mV of pump signal. The character of the resonance is also seen to be altered from a parallel resonance to a series resonance. The device has a resonant frequency of 399.74 kHz and a quality factor of 3807 in air.