Fabrication of Strain-Induced Graphene Resonant Mass Sensor Using Elastomer Nanosheet for Molecular Detection

MEMS resonant mass sensors provide an order of magnitude higher mass sensitivity by using graphene on its vibrating membrane. In this report, we developed a process technology for transferring strained graphene films during the transfer process and successfully fabricated a straininduced graphene resonant sensor using elastomer materials. We confirmed the presence of strain on suspended graphene by Raman shift and photoexcitation resonance measurements. Compared to the unstrained resonator, it showed more than 62% improvement in resonant characteristics. By functionalizing the strained suspended graphene surface with an aptamer, we demonstrated a frequency change in response to whole inactivated virus COVID-19, implying frequency response associated with molecular adsorption.