MEMS TE0-TEn Mode Selective Switch for Mode Division Multiplexing System

This paper reports a MEMS-enabled on-chip mode selective switch for mode division multiplexing system. The mode selective switch consists of MEMS-tunable mode converters, taper waveguide, and directional couplers. The measured crosstalk for TE0–TE1 and TE0–TE2 mode converter are less than -7.9 dB and -11 dB with 1.35±0.63 dB and 0.405±0.16 dB insertion loss, respectively. Furthermore, a TE
0
-TE
0,1,2
mode selective switch is fabricated, which showed an average -6.038 dB crosstalk value between TE
0
and TE
2
mode. Our proposed structure has advantages of good scalability, low power consumption and comparable mode crosstalk under the empowerment of MEMS technology.