High-Sensitivity Electrochemical Angular Accelerometer Relying on Soi-Based Microelectrodes

This paper reports a high-sensitivity electrochemical angular accelerometer relying on SOI-based microelectrodes featured with an obviously promoted sensitivity (380 V/(rad/s
²
) vs. 100 V/(rad/s
²
)) and noise (7.94×10
^-8
rad/s
²
/Hz
^1/2
vs. 5.62×10
^-6
rad/s
²
/Hz
^1/2
). This improvement was enabled by using the novel structure of SOI-based microelectrodes where the area of microelectrodes was effectively enlarged, which indicates the potential in the field of rotational seismology.