On-Line Laser Power Measurement Based on Microfabricated Sensor Device

A fiber-integrated sensor device for the laser power/energy on-line measurement without laser splitting and termination is presented in this research. This sensor device is fabricated via a standard microfabrication process. Laser power/energy is determined through the displacement of a movable mirror measured by an integrated Fabry-Perot (F-P) interferometer. Compared with performance in ambient, the non-linearity error in airtight condition is reduced from 6.11% to 0.02% and measurement range is extended by 5 times for CW laser measurement. For pulsed mode, the non-linearity error is reduced from 5.7% to 0.58% and sensitivity is improved by ~2 times. Therefore, wafer-level hermetic packaging is applied in the next-generation laser power/energy meter sensor device.