Tiltable Cantilever-Plate Based Piezoelectric Micromachined Ultrasonic Transducers (pMUT) with Large Linear Vibration Range and High Output Power

A novel air-coupled piezoelectric micromachined ultrasonic transducers (PMUT) is presented, which outperforms the state-of-the-art in three aspects: 1) High output sensitivity is achieved through cantilever-plate structured diaphragm 2) The linear vibration range is improved by 183% compared to the conventional PMUTs, 3) Tiltable property of the proposed PMUT structure enables the mechanical steering of the ultrasonic beam. The abovementioned improvements ensure its higher output sensitivity, larger output capacity and higher energy efficiency in acoustic beam steering.