Non-Linearity Corrections of Tapered Baw Transducers for Accurate FFT Computation Using Ultrasonic Wavefront Computing

We report a method to correct the non-linearity of tapered bulk-acoustic-wave (BAW) transducers for accurate Fourier Transform computation in an emerging highly efficient MEMS-based ultrasonic wavefront computing apparatus (UWFCA). The corrected design of the BAW transducer array minimizes not only the deviations from the design without tapered effect, but also the deviations from the analytical FFT results. Additionally, we further generalize the scaling corrected equations for the design of BAW transducers with arbitrary tapered angles from 0 to 60 degrees to guide the fabrication of the UWFCA.