A Bimodal "Sensor Chiplet" Platform Applied for Albumin and pH Multi-Chemical Sensing

A new concept of agile and multimodal chemical sensing platform, named "Sensor Chiplet" is proposed and experimentally validated. The concept is inspired by the recent trend in large scale integrated (LSI) circuits, to quickly realize high functionality by pieces of LSI "Chiplets". As a proof of concept, pH and albumin sensing was demonstrated by a bimodal device composed of two planar "Sensor Chiplets" having microelectrode arrays (MEAs). Two 8 ×16 mm
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Si chiplets with thirteen gold (Au) and indium tin oxide (ITO) microelectrodes with maximum electrode size of 512 × 512 μm
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were fabricated, functionalized, integrated and tested using surface micromachining, deep-reactive ion etching (RIE) and subsequent chemical functionalization. Results obtained shows that the proposed concept enables the integration of modalities without sacrificing sensitivity.