Micro-Sensors with Giant magnetoelectric Coefficient

This work introduces a small magnetic sensor with a high magnetoelectric coefficient. In magnetic sensors, a composite cantilever structure is made up of a substrate layer, a magnetostrictive layer, and a piezoelectric layer. The Galfenol film functions as a magnetostrictive layer, and the Zn-V-O film serves as a piezoelectric layer. The presented sensor, which is substantially better than earlier sensors due to a thinner substrate, a higher piezoelectric coefficient, and a lower coercive field, achieves a tremendous magnetoelectric coefficient of 9.32 kV/(cm·Oe) at 4.8 kHz. Also, the sensor’s limit of detection (LOD) at the resonant frequency is around 800 fT/√Hz.