High-Performance Silicon Carbide-on-Insulator Thermoresistive High-Temperature Sensor up to 750 °C

Accurate and reliable high-temperature measurement in hostile environments is crucial in various fields of science and engineering. Here, an advanced thermoresistive high-temperature sensor based on a 3C-silicon carbide-on-insulator (3C-SiCOI) platform is demonstrated, with the highest temperature sensing ability reported to date among SiC temperature sensors. This SiCOI temperature sensor exhibits linear current-voltage (I-V) characteristics, small hysteresis error, high sensitivity and reliability in a wide temperature range varying from room temperature to 750 °C. The natural logarithm of the measured resistance of the sensor is found to vary linearly with temperatures up to 750 °C. This high-performance SiCOI temperature sensor enabled by simple, cost-effective fabrication processes provides a feasible route toward high-temperature sensing in harsh environments.