CMOS Gas-Sensing Array by Novel Sensing Approach Using Mixed-Pixel-Architecture for Detection of Various Response of Gas-Sensitive Membranes

This paper reports a new sensor array that detects various responses to gas adsorption on gas-sensitive membranes, separately and simultaneously. The proposed sensor array is a mixed array in which conventional potential detection pixel arrays are replaced by newly fabricated pixels, that is, operational range and resistance detection pixels. The operation of the newly created pixels was confirmed by the simulation results, and an arrayed operation was expected. Because more information can be obtained from a gas-sensitive film by mixing pixels with different targets and characteristics, this device embodies an innovative sensing approach useful for multi-gas and odor sensing using machine learning.