Fabrication of Miniaturized Pressure Sensors for Invasive Pressure Measurements

We present a MEMS piezoresistive pressure sensor to place in catheters for neonatal applications, catheter size from 1 to 2 French units, i.e., sensor with the dimensions ‘Length*Width*Thickness’ of $500 \mu \mathrm{m} \times 150 \mu \mathrm{m} \times 150 \mu \mathrm{m}$. We designed, fabricated, and characterized this sensor, which can operate reliably in the pressure range of 0 to 300mmHg and has a sensitivity of $8 \mu \mathrm{V} / \mathrm{V} / \mathrm{mmHg}$ with a nonlinearity less than 1% of Full-Scale output.