A Linear Irradiance Control Power Supply for Dielectric Barrier Discharge Excimer Ultraviolet Lamps

The 222nm excimer ultraviolet (UV) lamp is a new type of UV lamp, which is considered to be the most promising UV lamp because it does no harm to human bodies. However, the irradiance of the UV lamp cannot be controlled linearly since the driving voltage is up to several thousands of volts, which poses a major challenge to the design of its power supply. In this paper, the radiation principle of excimer UV lamps is analyzed, based on which a power supply with resonant topology is designed for the UV lamp, and a linear irradiance control method by frequency control is proposed. A hardware testing platform is established, and the experimental results show that the proposed control method can linearly regulate the irradiance of the 222nm UV lamp with the R2 of 0.9996.