Research on a silicon resonant gas pressure transmitter

With the continuous development of science and technology, industrial control, meteorological detection, aerospace and other fields of pressure measurement accuracy requirements are also higher and higher, in order to achieve high-precision conversion of pressure signals from silicon resonant pressure sensors, a silicon resonant pressure transmitter capable of high-precision conversion of pressure signals was designed. The transmitter is supported by a hardware framework of the transmission system through a new type of circuit design and connecting cylinder shell model. Through hardware debugging and software design, the frequency signal output from the silicon resonant sensor is converted into a standard analog signal output. The test results show that the accuracy of the transmitter reaches 0.04% FS, which is significantly improved compared with the single crystal silicon pressure transmitter and has a broad development prospect.