Molded Foaming 3D MEMS Vapor Cell for Weak Magnetic Detection

A novel MEMS long optical path vapor cell for weak magnetic detection is proposed for the first time. By introducing a simple mold shaping during the thermoforming process, vapor cell with enhanced optical path length, buffer volume and optical transmittance is realized. The molded foaming method is estimated by finite element simulation before fabrication, and a single-beam atomic magnetometer prototype based on the fabricated vapor cell is developed to characterizing the cell performance. Experimental results show that the transmittance of the proposed vapor cell has a 15% improvement, and the magnetic noise floor of the MZ magnetometer is 5.4 pT/Hz
^1/2
at 1 Hz under 12000 nT.