Nonlinearity Identification of an Integrated Packaged Micro Gyro Operated in a Closed Loop Mode

We report on a new approach allowing parameters identification of a closed loop controlled microelectromechanical Coriolis Vibratory Gyroscopes (CVG) driven in a nonlinear regime. Since the drive mode amplitude and phase of the gyro module are both controlled, common nonlinearity identification techniques cannot be directly implemented. The model of an equivalent Duffing oscillator was used for the experimental data fit, for the closed loop control design, and then for the response prediction of devices driven at high amplitudes.