Robust High-G Microaccelerometers with Mechanical Low-Pass Filters and Electrical ROIC

This paper presents a shock measurement unit (SMU) composed of a cross-symmetric accelerometer core chip, a mechanical low-pass filter, and an electrical read-out integrated circuit (ROIC). The SMU shows a cross-axis sensitivity of less than 1%, a shock endurance as high as 150 kG, and high-frequency shock protection over 100 kHz, demonstrating a high survivability in extreme impact environments.