Vibration Rectification Error Reduction in Mems Vibrating Beam Accelerometers by Using the F-Squared Method

We present on the results of vibration rectification measurements for low-noise MEMS vibrating beam accelerometers (VBAs) [1] with a dynamic range of ± 25g. We introduce an experimental setup designed for precise and repeatable measurement of VRE using random vibration tests. These tests demonstrate scale factor non-linearity (SFNL) to be dominant contribution to vibration rectification error (VRE). In this paper, we demonstrate a significant reduction in SFNL and consequently the VRE coefficient by employing the f-squared method. This results in the demonstration of accelerometers with both high and low bias demonstrating a low measured VRE < 10 µg/g
²
.