Simulation-based approach in design of low stress Bowl-shaped Micro Hemispherical Resonators

This paper proposed a numerical simulation framework for the precision molding process to design low-stress Bowl-shaped Micro Hemispherical Resonators(BSRs). The impact of structural designs and process parameters on the internal stress of BSRs was investigates. During the heating stage, a two-dimensional axisymmetric model was established to understand how different structural parameters and bonding pressures affect internal stress. Subsequently, a generalized Newtonian isothermal flow model was established to anticipate the 3D geometries formed during the reflow molding process. Finally, model of cooling stage confirmed that the internal stress in the final formed shell remained within acceptable limits. After optimizing several parameters, the stress within the BSR was reduced to approximately 22 MPa. The simulation-based approach in this study can be used for the optimization of the BSRs’ geometry, achieving increased sphericity while minimizing stress.