Technology and performance of integrated complementary MOS circuits

The desirable characteristics of complementary MOS circuits are low standby power consumption, high speed, and high noise immunity. These require close control and matching of n- and p-channel transistor characteristics. Acceptable limits for mismatch between devices were derived based on circuit considerations and were related to process variables. Predicted performances were achieved using test circuits; feasibility of the technology has been shown. The reliability of fabricated test structures was evaluated.