High-accuracy 3D Reconstruction of MEMS Mirrors with Linear Transition Function

The traditional structured light (SL) 3D imaging method based on a digital light processing (DLP) projectors is often associated with several drawbacks, such as large size, high power consumption. In contrast, Micro Electro Mechanical Systems (MEMS) mirrors present a more advantageous alternative due to their compact size, fast scanning speed, low cost, and low power consumption. In this paper, we propose a 3D SL imaging system based on a uniaxial MEMS mirror, where a linear transition function is put forward to convert the optical model of the MEMS mirrors into a general perspective projection model. Therefore, we can employ the triangulation principle to achieve accurate 3D imaging results directly. Besides, the optimal parameters of the built MEMS mirror SL are obtained by solving a multi-error items energy function. Finally, some relevant experiments were designed to verify the feasibility and accuracy of the proposed mathematical model and calibration method.