A Lumped Element model for biaxial MEMS scanners

This paper presents a simulation method based on a lumped element formulation solved using a time discrete scheme able to predict the behavior of biaxial MEMS scanners. To simulate the dynamic behavior on the scanner on both axis, an equivalent electrical circuit is used. From the dimensions and materials of the scanner, the inertial mass, the torsional spring and the coupling factor can be derived. Using a time domain solver, the frequency response as well as the response of the scanner to different signals can be evaluated. This model could easily be extended to include nonlinear effects of the piezoelectric layer, as well as geometric nonlinearities.