A MEMS-Type Ionization Vacuum Sensor With a Wide Measurement Range

The letter presents a MEMS-type ionization vacuum sensor based on electron emission from an on-chip thermionic electron source. The sensor employs a multilayer-stacked structure fabricated by anodic bonding technology, showing overall dimensions of
$12\times 12\times3.3$
mm3. Because of the efficient and stable electron emission of an yttrium oxide electron source, the sensor exhibits a wide linear response range from
$1\times 10^{-{4}}$
Pa to 100 Pa with a good repeatability, covering both high and medium vacuum regimes. It provides a new miniature vacuum sensor with a wide measurement range.