A Review of MEMS Reliability Development

With the wide application of MEMS in aerospace and other industries as well as the continuous improvement of its importance, more and more attentions have been paid to MEMS reliability. This paper expounded the understanding of MEMS reliability, and then summarized the present research status of MEMS common failure modes and mechanisms, MEMS reliability design and analysis technology, MEMS reliability testing technology and MEMS reliability evaluation technology. Finally, the development trends of MEMS reliability technology were discussed.