Metal-Insulator-Metal Capacitor Integration in Bulk Acoustic Wave Filters

Metal-Insulator-Metal capacitors, MIMCAPs, integrated in bulk acoustic wave technology have proven critical for both performance and size reduction. This paper presents the most efficient technique for an accurate simulation and implementation of these capacitors using full-wave simulators. Some electromagnetic (EM) simulation challenges of MIMCAPs are introduced and the new design approach using low permittivity material is introduced to simulate the MIMCAPs. The measurements demonstrate that the proposed method allows us to implement the MIMCAPs with less than 3 percent inaccuracy during manufacturing.