Optical Coherence Tomography Imaging by a Fully Integrated MOEMS Endomicroscopy Probe With Mirau Microinterferometer and Two-Axis Electrothermal Microscanner Using Lissajous Trajectory Scanning

This article presents the results of a study focused on the development of an integrated probe intended for endomicroscopic application. A new type of transverse scanning probe is described, which was built using Mirau microinterferometer fabricated in micro-opto-electromechanical systems (MOEMS) technology, and a two-axis electrothermal actuator fabricated in micro-electromechanical systems (MEMS) technology, connected with a gradient-index (GRIN) lens collimator and single-mode fiber. Herein, we present a numerical analysis and an optimization of endomicroscopic probe-scanning properties, based on Lissajous curves. The key part of this article is 2-D and 3-D imaging of phantom structures, based on polymer material, light-scattering material, and USAF-target pattern visualized with an endomicroscopy probe. The imaging was obtained by the swept source optical coherence tomography (SS-OCT) technique, working at a central wavelength
$\lambda _{c}$
= 1060 nm, a swept range
$\Delta \lambda $
= 100 nm, an A-scan rate
${f}_{a}$
= 200 kHz, and the scanning of samples with the use of Lissajous curves.