Research on Radiation Emission Detection Method of Lithography Machine Subsystem

The electromagnetic compatibility test of the lithography machine subsystem is different from the testing of traditional products in the laboratory, especially the radiation emission test, which cannot be tested in a darkroom. Therefore, there are very high requirements for system layout, limit value selection, on-site noise investigation, etc. This article combines military standards to test and study the radiation emission of the lithography machine subsystem, in order to improve the electromagnetic compatibility of the lithography machine subsystem and provide reference opinions for the testing industry.