Driving Circuit of Multi-DOF Traveling-Wave Ultrasonic Motor Considering Stray Parameters

Multi-degree-of-freedom (Multi-DOF) ultrasonic motors can be applied to various precision occasions, and their application is inseparable from a suitable drive device. The special working mode of the ultrasonic motor determines that it has capacitive load characteristics and high-frequency operation. The stray parameters in the circuit cannot be ignored. In this paper, the driving circuit of the multi-DOF traveling-wave ultrasonic motor is designed considering the stray parameters. The circuit includes a push-pull inverter circuit, an absorption circuit, and an LCLC matching circuit. The working principle and the working state of the circuit are explained individually. The feasibility is verified by simulation and experiment.