Determination of the Resistance in TSV at Different Ambient Temperatures

This paper is devoted to study influence of different temperatures on electrical resistance of TSV with different metallization thickness. A simulation of electrical resistance was carried out at temperatures ranging from −40 to 80 °C, which determines the dependence of TSV electrical resistance on ambient temperature. Experimental measurements of interposer samples with TSVs were carried out and plots of the dependence of TSV electrical resistance on ambient temperature were made.