Parameterization of Micro-Milling Process for Fabrication of 0.22 THz Interaction Structure With Improved Surface Roughness and Dimensional Tolerance

In this paper, an effort has been made to analyze the micro-milling parameters on the development of planar interaction structure suitable for 0.22 THz source with improved surface roughness and dimensional tolerances. The various critical micro-milling parameters like feed rate has been varied between 0.05 mm/min to 1 mm/min, while two types of milling process have been utilized, namely hatching and contour. The spindle speed has also been varied from 10000 rpm to 20000 rpm. The whole set of experiments have been performed using coolant as well as without coolant. The effects of abovementioned variable milling parameters on the development of 0.22 THz planar beam-wave interaction structure have been analyzed using scanning electron microscope (SEM) machine. The experiments have been performed on two different types of vacuum-grade materials namely, OFHC copper and molybdenum.