An Integrated 1 × 5 MEMS Silicon Nitride Photonics Switch

We demonstrate a microelectromechanical system (MEMS) based 1 × 5 optical switch with integrated silicon nitride channel waveguides. Our MEMS actuator allows analog control for fine alignment in three switching positions. The other two switching positions rely upon electrostatic pull-in phenomena for digital switching. The samples tested demonstrate the broadband capability of the optical switch over the wavelength range of 1540 nm to 1625 nm. A minimum average insertion loss of 2.2 dB and a maximum average insertion loss of 7.5 dB was recorded for these devices in different switching positions. A custom microfabrication process developed by AEPONYX Inc was used to fabricate the devices.