Identifying the Actual Operating Frequency of the Microwave Sensor With High Resolution and High Dynamic Range

The development of semiconductor technology has enabled the planarization and miniaturization of microwave sensors and it brought challenge for near-field microwave measurements at micro and nanoscale. In this article, we propose a method for detecting microwave frequency on sensing chip surface with high resolution via scanning probe microscopy and microwave detection technology. The radiated signal of microwave sensor is determined by analyzing the center frequency of the
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oscillation curve, and the high-precision measurement of both single-frequency and multifrequency signals is achieved over a wide operating range of frequencies (100 kHz–10 GHz), with low power (−20 dBm) and minimal error (8 Hz). Due to the simplicity, flexibility, and accuracy of frequency identification technique, the proposed method can be applied to the design, failure analysis, and performance optimization of microwave sensor at micro and nanoscale.