A Wavelength-Stabilized and Quasi-Common-Path Heterodyne Grating Interferometer With Sub-Nanometer Precision

Grating interferometers highly valued for high resolution, straightforward benchmark, and insensitivity to environmental disturbances have become one of the most mainstream methods for ultraprecision positioning. Traditional heterodyne grating interferometers which use a dual-frequency orthogonally polarized laser source suffer nanometer-level periodic nonlinear error due to frequency and polarization mixing, thus becoming incompetent to undertake sub-nanometer measurement. Based on the design of two separated laser beams with a small frequency difference for heterodyne beating, a wavelength-stabilized and quasi-common-path heterodyne grating interferometer is proposed. It incorporates a symmetrical oblique incidence structure where the residual dead path is calibrated and the laser source wavelength is stabilized to the rubidium atomic transition line, diminishing heterodyne phase errors resulted from the optical path difference. This approach not only significantly mitigates periodic nonlinear error to below 0.3 nm but also enhances measurement resolution, repeatability, and interference robustness. The proposed heterodyne grating interferometer is determined for ultraprecision positioning serving for precision machinery manufacturing and scanning beam interference lithography and so forth.