Cross-talk suppression Faraday cage structure in silicon-on-insulator

Substrate crosstalk presents a fundamental limitation to further increases in integration of mixed signal RF telecommunication ICs. In this work, results of cross-talk suppression in ground plane SOI (GPSOI) are presented where the buried metal ground planes are combined with vertical metal-filled trenches to form a complete Faraday cage structure around the transmitter and receiver. Measurements indicate that cross-talk suppression is enhanced by 70 dB at 1 GHz.