Research and Fabrication of Combustible Gas Sensor Based on Ceramic Additive and Subtract Hybrid Manufacturing Technology

In order to solve the problems of poor adaptability and low reliability of silicon based methane sensor, a new type of ceramic based methane sensor was proposed. The gas sensor is made based on the theory of catalytic combustion. The electrochemical additive hybrid method was optimized to fabricate alumina films with nanoporous holes, next the MEMS material reduction manufacturing technology is used to form the sensor substrate. Then the design of the sensitive chip is verified by finite element simulation analysis. Finally, under the action of ultrasound, the chip is immersed in the solution containing Pd and Pt catalysts to make a MEMS catalytic methane sensor. The test results show that the sensor has high sensitivity to methane, with an average response sensitivity of 36m V/(1%) CH4, a 90% response time of 7s to methane gas, and a recovery time of 11s. The output of the sensor is stable under high temperature and humidity environment.