Research on Key Technologies of Ceramic MEMS Platinum Rhodium 10-platinum Thermocouple

In order to solve many technical problems of high temperature thermocouple for gas turbine temperature detection, such as large heat capacity, slow response time, and inability to mount table, a ceramic MEMS high temperature thermocouple with redundant function was developed based on ceramic MEMS technology. Based on the micromachining technology, the thermocouple base was made, and the sensitive heating electrode pattern of platinum rhodium 10-platinum thermocouple (S-type thermocouple) was formed by the film process. The flexible thermocouple was formed by the sandwich packaging of the sensitive element, and the high temperature thermocouple calibration test system was developed. The experimental results show that the designed MEMS high temperature thermocouple has the characteristics of fast response, and can be installed on a smooth surface. The output sensitivity of the thermocouple is compared with that of the secondary standard platinum rhodium 10-platinum thermocouple in the temperature range of 0 ∼ 1000 °C, the deviation is ±0.3%, and the 90% response time is 22 ms.