Integrated Resonant Cantilever with Dual Thermoanalytical Functions of Thermogravimetric Analysis and Differential Thermal Analysis

We demonstrate the integrated MEMS sensor platform, combining dual thermoanalytical functions of thermogravimetric analysis (TGA) and differential thermal analysis (DTA). Compared with state-of-the-art TGA/DTA devices, we implement dual functions by developing a new type of MEMS cantilever that integrates a microheater for programmed heating, thermocouples for temperature monitoring, and resonance excitation/readout resistors for mass loss detection. Our cantilevers exhibit a power responsivity of 6V/W, temperature sensitivity of 0.73mV/°C, and mass responsivity of 0.09Hz/pg, which are of orders of magnitude higher than the conventional TGA/DTA apparatus. We verified the dual functions by performing TGA measurement on calcium oxalate monohydrate (CaC
2
O
4
∙H
2
O) and DTA measurement on indium (In), both show good agreement with the nominal values.