A Front-Side Fabricated Monolithic 5000g-/100000g-Measured Range Composite Shock Accelerometers with Small Chip-Size, High Resonant Frequency and Ultra-High Anti-overload Capacity

Reported is a monolithically integrated 5000g-/100000g-ranged composited shock accelerometers with the capacity of high resonant frequency and ultra-high anti-overload. Herein, all of the movable sensing elements are only fabricated from the front side of an ordinary (111) non-SOI wafers, resulting in a small chip-size of 1.8mm×1.8mm. Benefited to the design of the combshaped squeeze film damping and curved-surface overload protection structure, besides the sensitivity of 14.8µV/g (without amplification) 5000g-ranged accelerometer achieves a high resonant frequency of 24kHz and an ultrahigh anti-overload capacity of 70000g.