TA 0.34Deg/Hour Bulk Acoustic Wave Gyroscope in 4H Silicon-Carbide with an Elevated-Temperature Enhanced Q-Factor of 4.6 Million

This paper presents a comprehensive exploration of the first ovenized bulk acoustic wave (BAW) gyroscope implemented in thick monocrystalline silicon-carbide (SiC), showcasing sub-degree bias instability (BI) and superior angle random walk (ARW) compared to state-of-the-art planar silicon counterparts. Notably, the study delves into the positive temperature coefficient of Q-factor (TCQ) observed in semi-solid BAW disk SiC resonators, enabling ovenization at 80℃ and achieving a remarkable thermoelastic damping (TED) limited Q of 4.6 million at a high frequency of 3MHz. The findings highlight SiC, specifically in 4H-SiC, as a promising platform for next-generation MEMS precision positioning, navigation, and timing (PNT) devices.