PMUT Package Design Optimization via Machine Learning

This work uses supervised learning to optimize the package design with validated experimental results for piezoelectric micromachined ultrasonic transducers (PMUTs) to increase and alter the sound pressure level (SPL). Advancements as compared to the state-of-art include: (1) a neural network model to achieve a mean squared error of less than 0.65 dB
²
post 100 epochs; (2) increased vibration amplitude by 17.9 dBV at the first-mode resonance frequency of 33.5 kHz; and (3) SPL enhancements below the 20 kHz frequency range such as the magnitude increases of more than 60 dBV at 5 kHz. As such, the package design shifts the emitting acoustic energy from the ultrasound to audio range in favor of various applications, including audio speakers.