0.018 °/√hr, SUB-0.2 °/hr MEMS Pitch/Roll Piezoresistive Gyroscope with Decoupled Tilt of the Mass and of the Gauges Lever

This work presents a novel single-axis gyroscope for pitch (or roll) rate detection based on an improved stress amplification architecture for the piezoresistive nano-gauges of the sense mode. The design decouples the lever tilting angle, responsible of the stress applied onto the gauges, and thus of the scale-factor, from the proof mass tilting angle induced by the Coriolis force: this determines a sensitivity increase and thus the possibility to obtain high-performance pitch rate detection. The sensor is coupled to an integrated circuit which sustains the drive oscillation and reads out the open-loop sense chain. Results show 306 µdps/√Hz angle random walk and 0.12 °/hr bias stability, which rank this device among the top performing pitch/roll gyroscopes in the literature, in ultra-small footprint.