3.8×3.8 mm2 Tiny Piezoelectric Resonant MEMS Scanner Using Fork-Shaped and Ring-Shaped Actuators

We developed a 3.8×3.8 mm
²
tiny resonant piezoelectric MEMS scanner with a 1.0-mm mirror using double coupling frames. The proposed scanner utilizes the mechanical coupling of two Pb(Zr,Ti)O
3
(PZT) piezoelectric actuators: fork-shaped and ring-shaped actuators. The proposed two-actuator design increases the efficiency of area usage for driving actuators per die and improves the resonant frequency owing to the mechanical coupling of the two actuators. Besides, the proposed design reduces mechanical stress by making the operating scanning frequency higher than the other scanning modes. The resonant frequency of the proposed scanner is 27.09 kHz, and the optical scan angle is 40 degrees with a unipolar driving voltage of 25.2 V.